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關於真空中的sccm單位問題

在真空中常常會看到sccm,但是並不知道那是何意思,煩請各位先進解答

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sccm的英文全名是 standard cubic centimeter per minute , 是一種氣體流量單位,

1sccm代表在標準狀態(溫度 273K, 壓力 760 torr) 下, 每分鐘有1cm^3 的氣體流量.

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